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CMP Machine structure & operations wins the ASMC 2023 best paper award!

We are thrilled to announce that our paper titled ‘The Impact of Data Fragmentation on Processing Time Modeling in Semiconductor Manufacturing’ has won the Best Paper Award at ASMC 2023. This achievement highlights the dedication and expertise of our team and our academic partners in tackling complex challenges within semiconductor manufacturing processes. 

We are grateful for this recognition and extend our sincere thanks to the conference organizers, reviewers, and our colleagues for their support. 

The paper, with as main author Valeria Borodin, describes a novel method to improve the modeling of processing times in a Chemical Mechanical Planarization machine when the input data is very fragmented. 

This award inspires us to continue pushing the boundaries of innovation in our field. 

Link to the paper:

And don’t forget this Wednesday, May 15, at ASMC 2024, Jeroen will present our collaborative work with Micron Technology, focusing on the utilization of multi-agent reinforcement learning to optimize fab scheduling operations.


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